TY - GEN
T1 - A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity
AU - Mohammed, Zakriya
AU - Bojesomo, Alabi
AU - Gill, Waqas A.
AU - Elfadel, Ibrahim M.
AU - Rasras, Mahmoud
PY - 2016/7/2
Y1 - 2016/7/2
N2 - This paper reports on the design and optimization of a 2-Axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer consists of a square proof mass suspended using crab leg springs. As dual axis accelerometers are designed to work in both in-plane directions, they are prone to cross-coupling between in-plane acceleration and Z-Axis acceleration. This is due to the structural design that makes them sensitive to cross-Axis acceleration. Moreover, low stiffness in Z-Axis causes the proof-mass to sag due to gravity. In the present paper, we address the cross-Axis sensitivity issue in the context of a high-sensitivity, differential capacitive accelerometer in a small footprint of 1.5mm x 1.5 mm, with reduced in-plane cross-Axis sensitivity and high frequency separation among the in-plane and Z-Axis modes. Simulation results show a differential capacitive sensitivity of 59fF/g (g=9.8 m/s2) can be achieved. The device also has a mode separation of 10 kHz between in-plane and out-of-The plane modes. The average cross-Axis sensitivity in XY is 1.33% and the cross-Axis sensitivity due to Z-Axis acceleration is zero.
AB - This paper reports on the design and optimization of a 2-Axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer consists of a square proof mass suspended using crab leg springs. As dual axis accelerometers are designed to work in both in-plane directions, they are prone to cross-coupling between in-plane acceleration and Z-Axis acceleration. This is due to the structural design that makes them sensitive to cross-Axis acceleration. Moreover, low stiffness in Z-Axis causes the proof-mass to sag due to gravity. In the present paper, we address the cross-Axis sensitivity issue in the context of a high-sensitivity, differential capacitive accelerometer in a small footprint of 1.5mm x 1.5 mm, with reduced in-plane cross-Axis sensitivity and high frequency separation among the in-plane and Z-Axis modes. Simulation results show a differential capacitive sensitivity of 59fF/g (g=9.8 m/s2) can be achieved. The device also has a mode separation of 10 kHz between in-plane and out-of-The plane modes. The average cross-Axis sensitivity in XY is 1.33% and the cross-Axis sensitivity due to Z-Axis acceleration is zero.
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U2 - 10.1109/MWSCAS.2016.7870040
DO - 10.1109/MWSCAS.2016.7870040
M3 - Conference contribution
AN - SCOPUS:85015840109
T3 - Midwest Symposium on Circuits and Systems
BT - 2016 IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 59th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2016
Y2 - 16 October 2016 through 19 October 2016
ER -