A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity

Zakriya Mohammed, Alabi Bojesomo, Waqas A. Gill, Ibrahim M. Elfadel, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the design and optimization of a 2-Axis, single proof mass MEMS capacitive accelerometer, using the Inertial Measurement Unit (IMU) platform of GlobalFoundries. The accelerometer consists of a square proof mass suspended using crab leg springs. As dual axis accelerometers are designed to work in both in-plane directions, they are prone to cross-coupling between in-plane acceleration and Z-Axis acceleration. This is due to the structural design that makes them sensitive to cross-Axis acceleration. Moreover, low stiffness in Z-Axis causes the proof-mass to sag due to gravity. In the present paper, we address the cross-Axis sensitivity issue in the context of a high-sensitivity, differential capacitive accelerometer in a small footprint of 1.5mm x 1.5 mm, with reduced in-plane cross-Axis sensitivity and high frequency separation among the in-plane and Z-Axis modes. Simulation results show a differential capacitive sensitivity of 59fF/g (g=9.8 m/s2) can be achieved. The device also has a mode separation of 10 kHz between in-plane and out-of-The plane modes. The average cross-Axis sensitivity in XY is 1.33% and the cross-Axis sensitivity due to Z-Axis acceleration is zero.

Original languageEnglish (US)
Title of host publication2016 IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509009169
DOIs
StatePublished - Jul 2 2016
Event59th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2016 - Abu Dhabi, United Arab Emirates
Duration: Oct 16 2016Oct 19 2016

Publication series

NameMidwest Symposium on Circuits and Systems
Volume0
ISSN (Print)1548-3746

Other

Other59th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2016
CountryUnited Arab Emirates
CityAbu Dhabi
Period10/16/1610/19/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Mohammed, Z., Bojesomo, A., Gill, W. A., Elfadel, I. M., & Rasras, M. (2016). A crab leg suspension based dual axis MEMS accelerometer with low cross axis sensitivity. In 2016 IEEE 59th International Midwest Symposium on Circuits and Systems, MWSCAS 2016 [7870040] (Midwest Symposium on Circuits and Systems; Vol. 0). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MWSCAS.2016.7870040