TY - GEN
T1 - A hybrid opto-mechanical micro-disk inertia sensor
AU - Dushaq, Ghada
AU - Mulugeta, Tadesse
AU - Rasras, Mahmoud
N1 - Publisher Copyright:
© OSA 2015.
PY - 2015
Y1 - 2015
N2 - We numerically present optically enabled micro-disk inertia sensor. It consists of a disk-shaped proof mass integrated on top of an optical waveguide. It exhibits a sensitivity of 12dB/μm displacement and a dynamic range of 1g-10g.
AB - We numerically present optically enabled micro-disk inertia sensor. It consists of a disk-shaped proof mass integrated on top of an optical waveguide. It exhibits a sensitivity of 12dB/μm displacement and a dynamic range of 1g-10g.
UR - http://www.scopus.com/inward/record.url?scp=85088768514&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85088768514&partnerID=8YFLogxK
U2 - 10.1364/fio.2015.ftu5c.2
DO - 10.1364/fio.2015.ftu5c.2
M3 - Conference contribution
AN - SCOPUS:85088768514
T3 - Proceedings of Frontiers in Optics 2015, FIO 2015
BT - Proceedings of Frontiers in Optics 2015, FIO 2015
PB - Optica Publishing Group (formerly OSA)
T2 - Frontiers in Optics 2015, FIO 2015
Y2 - 18 October 2015 through 22 October 2015
ER -