A New-AFM Based Lithography Method: Thermochemical Nanolithography

D. Wang, Robert Szoszkiewicz, Vamsi K. Kodali, J. Curtis, Seth R. Marder, Elisa Riedo

Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review

Original language	English (US)
Title of host publication	Biomimetics and Industrial Applications
Publisher	Springer
Volume	10
State	Published - 2010

Name	Applied Scanning Probe Methods

Cite this

@inbook{a194c5db068d4fa2b2c98c484f7d2f8d,

title = "A New-AFM Based Lithography Method: Thermochemical Nanolithography",

author = "D. Wang and Robert Szoszkiewicz and Kodali, {Vamsi K.} and J. Curtis and Marder, {Seth R.} and Elisa Riedo",

year = "2010",

language = "English (US)",

volume = "10",

series = "Applied Scanning Probe Methods",

publisher = "Springer",

booktitle = "Biomimetics and Industrial Applications",

}