A New-AFM Based Lithography Method: Thermochemical Nanolithography

D. Wang, Robert Szoszkiewicz, Vamsi K. Kodali, J. Curtis, Seth R. Marder, Elisa Riedo

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Original languageEnglish (US)
Title of host publicationBiomimetics and Industrial Applications
PublisherSpringer
Volume10
StatePublished - 2010

Publication series

NameApplied Scanning Probe Methods

Cite this

Wang, D., Szoszkiewicz, R., Kodali, V. K., Curtis, J., Marder, S. R., & Riedo, E. (2010). A New-AFM Based Lithography Method: Thermochemical Nanolithography. In Biomimetics and Industrial Applications (Vol. 10). (Applied Scanning Probe Methods). Springer.