TY - GEN
T1 - A Quad-Cantilevered Plate micro-sensor for intracranial pressure measurement
AU - Lalkov, Vasko
AU - Qasaimeh, Mohammad A.
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/9/13
Y1 - 2017/9/13
N2 - This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.
AB - This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.
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U2 - 10.1109/EMBC.2017.8036925
DO - 10.1109/EMBC.2017.8036925
M3 - Conference contribution
C2 - 29059973
AN - SCOPUS:85032175580
T3 - Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
SP - 718
EP - 721
BT - 2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017
Y2 - 11 July 2017 through 15 July 2017
ER -