A Quad-Cantilevered Plate micro-sensor for intracranial pressure measurement

Vasko Lalkov, Mohammad A. Qasaimeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.

Original languageEnglish (US)
Title of host publication2017 39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
Subtitle of host publicationSmarter Technology for a Healthier World, EMBC 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages718-721
Number of pages4
ISBN (Electronic)9781509028092
DOIs
StatePublished - Sep 13 2017
Event39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017 - Jeju Island, Korea, Republic of
Duration: Jul 11 2017Jul 15 2017

Publication series

NameProceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
ISSN (Print)1557-170X

Other

Other39th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2017
Country/TerritoryKorea, Republic of
CityJeju Island
Period7/11/177/15/17

ASJC Scopus subject areas

  • Signal Processing
  • Biomedical Engineering
  • Computer Vision and Pattern Recognition
  • Health Informatics

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