Design, construction and characterization of low thermal mass hot stage for scanning probe microscopy (SPM) was discussed. The hot stage has a heater and a thermometer on a single 10×10×0.5 mm silicon chip. It was found that the chips provides spring contact electrodes an external temperature controller.
|Original language||English (US)|
|Number of pages||3|
|Journal||Review of Scientific Instruments|
|Issue number||3 I|
|State||Published - Mar 2003|
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