A replaceable, low thermal mass hot stage for scanning probe microscopy

Matthew L. Trawick, Dan E. Angelescu, Paul M. Chaikin, Michael J. Valenti, Richard A. Register

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Design, construction and characterization of low thermal mass hot stage for scanning probe microscopy (SPM) was discussed. The hot stage has a heater and a thermometer on a single 10×10×0.5 mm silicon chip. It was found that the chips provides spring contact electrodes an external temperature controller.

    Original languageEnglish (US)
    Pages (from-to)1390-1392
    Number of pages3
    JournalReview of Scientific Instruments
    Volume74
    Issue number3 I
    DOIs
    StatePublished - Mar 2003

    ASJC Scopus subject areas

    • Instrumentation

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