@inproceedings{da513d10056945f6bf1ec40fa03bae2b,
title = "A Simple, Cost Effective, and Very Sensitive Alternative for Photon Emission Spectroscopy",
abstract = "A new, simple and cost effective photo emission microscope (PEM) for continuous wavelength measurement is proposed (SPEMMI: Spectroscopic Photo Emission Microscope). The new system uses only one sensitive detector (GENllI-NIR) for both conventional failure detection and spectral analysis. The spectrometer and the mechanical parts, used to build up the SPEMMI, are presented. Also the required calibration procedures are discussed. To demonstrate the functionality of the new system, spectra of hot carriers in a saturated NMOS transistor and of a diode in forward and reverse biased conditions are discussed. In addition, the application of SPEMMI for determination of failures that occur in industrial IoDQ-failed VLSI chips is illustrated.",
author = "M. Rasras and Wolf, {Ingrid De} and G. Groeseneken and Maes, {H. E.} and S. Vanhaeverbeke and {De Pauw}, P.",
note = "Publisher Copyright: Copyright {\textcopyright} 1997 ASM International.; 23rd International Symposium for Testing and Failure Analysis, ISTFA 1997 ; Conference date: 28-10-0199 Through 01-11-0199",
year = "1997",
doi = "10.31399/asm.cp.istfa1997p0153",
language = "English (US)",
series = "Conference Proceedings from the International Symposium for Testing and Failure Analysis",
publisher = "ASM International",
pages = "153--157",
booktitle = "ISTFA 1997",
address = "United States",
}