A Simple, Cost Effective, and Very Sensitive Alternative for Photon Emission Spectroscopy

M. Rasras, Ingrid De Wolf, G. Groeseneken, H. E. Maes, S. Vanhaeverbeke, P. De Pauw

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new, simple and cost effective photo emission microscope (PEM) for continuous wavelength measurement is proposed (SPEMMI: Spectroscopic Photo Emission Microscope). The new system uses only one sensitive detector (GENllI-NIR) for both conventional failure detection and spectral analysis. The spectrometer and the mechanical parts, used to build up the SPEMMI, are presented. Also the required calibration procedures are discussed. To demonstrate the functionality of the new system, spectra of hot carriers in a saturated NMOS transistor and of a diode in forward and reverse biased conditions are discussed. In addition, the application of SPEMMI for determination of failures that occur in industrial IoDQ-failed VLSI chips is illustrated.

Original languageEnglish (US)
Title of host publicationISTFA 1997
Subtitle of host publicationConference Proceedings from the 23rd International Symposium for Testing and Failure Analysis
PublisherASM International
Pages153-157
Number of pages5
ISBN (Electronic)9781615030828
DOIs
StatePublished - 1997
Event23rd International Symposium for Testing and Failure Analysis, ISTFA 1997 - Santa Clara, United States
Duration: Oct 28 0199Nov 1 0199

Publication series

NameConference Proceedings from the International Symposium for Testing and Failure Analysis
Volume1997-October

Conference

Conference23rd International Symposium for Testing and Failure Analysis, ISTFA 1997
Country/TerritoryUnited States
CitySanta Clara
Period10/28/9911/1/99

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality

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