Today, there is a need to simultaneously characterize the N and N*2 fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*2 in an N2 plasma.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Dec 15 2003|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)