Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4)

R. Basner; M. Schmidt; E. Denisov; K. Becker; H. Deutsch

doi:10.1063/1.1333018

Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF₄)

R. Basner, M. Schmidt, E. Denisov, K. Becker, H. Deutsch

Research output: Contribution to journal › Article › peer-review

Abstract

The absolute partial and total electron impact ionization cross sections of SiF₄, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.

Original language	English (US)
Pages (from-to)	1170-1177
Number of pages	8
Journal	Journal of Chemical Physics
Volume	114
Issue number	3
DOIs	https://doi.org/10.1063/1.1333018
State	Published - Jan 2001

ASJC Scopus subject areas

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1063/1.1333018

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title = "Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4)",

abstract = "The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.",

author = "R. Basner and M. Schmidt and E. Denisov and K. Becker and H. Deutsch",

year = "2001",

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doi = "10.1063/1.1333018",

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T1 - Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF4)

AU - Basner, R.

AU - Schmidt, M.

AU - Denisov, E.

AU - Becker, K.

AU - Deutsch, H.

PY - 2001/1

Y1 - 2001/1

N2 - The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.

AB - The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.

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Absolute total and partial cross sections for the electron impact ionization of tetrafluorosilane (SiF₄)

Abstract

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