The absolute partial and total electron impact ionization cross sections of SiF4, including all singly charged positive ions and the doubly charged ions were analyzed. The total ionization cross section was obtained as the sum of the partial cross sections. Total single ionization cross section was compared with results of the semiclassical and semiempirical calculations and reasonable agreement was found.
ASJC Scopus subject areas
- Physics and Astronomy(all)
- Physical and Theoretical Chemistry