Absolute total and partial electron ionization cross sections of C2F6

R. Basner, M. Schmidt, E. Denisov, P. Lopata, K. Becker, H. Deutsch

Research output: Contribution to journalArticle

Abstract

We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections.

Original languageEnglish (US)
Pages (from-to)365-374
Number of pages10
JournalInternational Journal of Mass Spectrometry
Volume214
Issue number3
DOIs
StatePublished - Mar 15 2002

Keywords

  • Cross sections
  • Electron ionization
  • Hexafluoroethane
  • Plasma etching
  • Tetrafluoromethane

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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