Abstraction of hydrogen by SiH radicals from hydrogenated amorphous silicon surfaces

Material Science

• Amorphous Silicon 100%
• Film 50%
• Activation Energy 50%
• Film Deposition 50%
• Plasma Deposition 50%

Keyphrases

• Exothermic Reaction 50%
• Surface Coordination 50%
• Eley-Rideal Reaction 50%
• Hydrogen Abstraction Reaction 50%
• Coordination Defects 50%

Engineering

• Exothermic Reaction 50%