Advanced scanning probe lithography

Ricardo Garcia, Armin W. Knoll, Elisa Riedo

Research output: Contribution to journalReview articlepeer-review

Abstract

The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications.

Original languageEnglish (US)
Pages (from-to)577-587
Number of pages11
JournalNature Nanotechnology
Volume9
Issue number8
DOIs
StatePublished - Aug 2014

ASJC Scopus subject areas

  • Bioengineering
  • Atomic and Molecular Physics, and Optics
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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