Advances in fully CMOS integrated photonic devices

Jurgen Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, W. P. Giziewicz, M. Beals, L. C. Kimerling, A. Kopa, A. B. Apsel, M. S. Rasras, D. M. Gill, S. S. Patel, K. Y. Tu, Y. K. Chen, A. E. White, A. Pomerene, D. Carothers, M. J. Grove

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

Original languageEnglish (US)
Title of host publicationSilicon Photonics II
StatePublished - 2007
EventSilicon Photonics II - San Jose, CA, United States
Duration: Jan 22 2007Jan 24 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherSilicon Photonics II
Country/TerritoryUnited States
CitySan Jose, CA


  • EPIC
  • Modulator driver
  • Optical filter
  • Optical receiver
  • Photodetector

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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