Advances in fully CMOS integrated photonic devices

Jurgen Michel; J. F. Liu; D. H. Ahn; D. Sparacin; R. Sun; C. Y. Hong; W. P. Giziewicz; M. Beals; L. C. Kimerling; A. Kopa; A. B. Apsel; M. S. Rasras; D. M. Gill; S. S. Patel; K. Y. Tu; Y. K. Chen; A. E. White; A. Pomerene; D. Carothers; M. J. Grove

doi:10.1117/12.706586

Advances in fully CMOS integrated photonic devices

Jurgen Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, W. P. Giziewicz, M. Beals, L. C. Kimerling, A. Kopa, A. B. Apsel, M. S. Rasras, D. M. Gill, S. S. Patel, K. Y. Tu, Y. K. Chen, A. E. White, A. Pomerene, D. Carothers, M. J. Grove

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

Original language	English (US)
Title of host publication	Silicon Photonics II
DOIs	https://doi.org/10.1117/12.706586
State	Published - 2007
Event	Silicon Photonics II - San Jose, CA, United States Duration: Jan 22 2007 → Jan 24 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6477
ISSN (Print)	0277-786X

Other

Other	Silicon Photonics II
Country/Territory	United States
City	San Jose, CA
Period	1/22/07 → 1/24/07

Keywords

EPIC
Modulator driver
Optical filter
Optical receiver
Photodetector

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.706586

Cite this

Michel, J., Liu, J. F., Ahn, D. H., Sparacin, D., Sun, R., Hong, C. Y., Giziewicz, W. P., Beals, M., Kimerling, L. C., Kopa, A., Apsel, A. B., Rasras, M. S., Gill, D. M., Patel, S. S., Tu, K. Y., Chen, Y. K., White, A. E., Pomerene, A., Carothers, D., & Grove, M. J. (2007). Advances in fully CMOS integrated photonic devices. In Silicon Photonics II Article 64770P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6477). https://doi.org/10.1117/12.706586

Michel, J, Liu, JF, Ahn, DH, Sparacin, D, Sun, R, Hong, CY, Giziewicz, WP, Beals, M, Kimerling, LC, Kopa, A, Apsel, AB, Rasras, MS, Gill, DM, Patel, SS, Tu, KY, Chen, YK, White, AE, Pomerene, A, Carothers, D & Grove, MJ 2007, Advances in fully CMOS integrated photonic devices. in Silicon Photonics II., 64770P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6477, Silicon Photonics II, San Jose, CA, United States, 1/22/07. https://doi.org/10.1117/12.706586

@inproceedings{77a46d876956457eb5a25f972cf04dc1,

title = "Advances in fully CMOS integrated photonic devices",

abstract = "The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.",

keywords = "EPIC, Modulator driver, Optical filter, Optical receiver, Photodetector",

author = "Jurgen Michel and Liu, {J. F.} and Ahn, {D. H.} and D. Sparacin and R. Sun and Hong, {C. Y.} and Giziewicz, {W. P.} and M. Beals and Kimerling, {L. C.} and A. Kopa and Apsel, {A. B.} and Rasras, {M. S.} and Gill, {D. M.} and Patel, {S. S.} and Tu, {K. Y.} and Chen, {Y. K.} and White, {A. E.} and A. Pomerene and D. Carothers and Grove, {M. J.}",

year = "2007",

doi = "10.1117/12.706586",

language = "English (US)",

isbn = "0819465909",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Silicon Photonics II",

note = "Silicon Photonics II ; Conference date: 22-01-2007 Through 24-01-2007",

}

TY - GEN

T1 - Advances in fully CMOS integrated photonic devices

AU - Michel, Jurgen

AU - Liu, J. F.

AU - Ahn, D. H.

AU - Sparacin, D.

AU - Sun, R.

AU - Hong, C. Y.

AU - Giziewicz, W. P.

AU - Beals, M.

AU - Kimerling, L. C.

AU - Kopa, A.

AU - Apsel, A. B.

AU - Rasras, M. S.

AU - Gill, D. M.

AU - Patel, S. S.

AU - Tu, K. Y.

AU - Chen, Y. K.

AU - White, A. E.

AU - Pomerene, A.

AU - Carothers, D.

AU - Grove, M. J.

PY - 2007

Y1 - 2007

N2 - The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

AB - The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

KW - EPIC

KW - Modulator driver

KW - Optical filter

KW - Optical receiver

KW - Photodetector

UR - http://www.scopus.com/inward/record.url?scp=34248641986&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34248641986&partnerID=8YFLogxK

U2 - 10.1117/12.706586

DO - 10.1117/12.706586

M3 - Conference contribution

AN - SCOPUS:34248641986

SN - 0819465909

SN - 9780819465900

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Silicon Photonics II

T2 - Silicon Photonics II

Y2 - 22 January 2007 through 24 January 2007

ER -

Advances in fully CMOS integrated photonic devices

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Keywords

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