An H-control scheme for an electrostatic micro-actuator with structured uncertainty

Marialena Vagia, George Nikolakopoulos, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article an H -controller for an electrostatic micro-actuator (e-μA) whose model is linearized at multiple operating points, with structured uncertainty is presented. The (e-μA) is composed of a micro capacitor whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The nonlinear model of the e-μA is linearized in multiple operating points with respect to the plates' displacement for the set of the resulting multiple operating models. A robust H-controller relying on LMI-theory is designed. The resulting controller stabilizes the set of linearized systems at the operating points despite the induced uncertainty. The proposed control scheme is applied on the nonlinear model of the e-μA, where the presented multiple simulation results prove the efficacy of the utilized controller.

Original languageEnglish (US)
Title of host publication16th IEEE International Conference on Control Applications, CCA 2007. Part of IEEE Multi-conference on Systems and Control
Pages130-135
Number of pages6
DOIs
StatePublished - 2007
Event16th IEEE International Conference on Control Applications, CCA 2007. Part of IEEE Multi-conference on Systems and Control - , Singapore
Duration: Oct 1 2007Oct 3 2007

Publication series

NameProceedings of the IEEE International Conference on Control Applications

Other

Other16th IEEE International Conference on Control Applications, CCA 2007. Part of IEEE Multi-conference on Systems and Control
CountrySingapore
Period10/1/0710/3/07

ASJC Scopus subject areas

  • Engineering(all)

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