An on-wafer probe array for measuring two-dimensional ion flux distributions in plasma reactors

Tae Won Kim, Saurabh J. Ullal, Vahid Vahedi, Eray S. Aydil

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)3494
Number of pages1
JournalReview of Scientific Instruments
Issue number10
StatePublished - Oct 2002

ASJC Scopus subject areas

  • Instrumentation

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