An optimization technique for performance improvement of gap-changeable MEMS accelerometers

Engineering

• Axis Accelerometer 100%
• Capacitive 50%
• Capacitive Accelerometer 50%
• Finite Element Method 50%
• Inertial Measurement 50%
• Mass Displacement 50%
• Microelectromechanical System 100%
• Optimization Technique 100%
• Performance Improvement 100%
• Proof Mass 50%
• Rotors 50%
• Simulation Result 50%
• Units of Measurement 50%

Keyphrases

• Compact Footprint 50%
• Device Sensitivity 50%
• Parabolic Behavior 50%
• Single Axis Accelerometer 100%