Abstract
We analyze electrostatic deformations of rectangular, annular circular, solid circular, and elliptic micro-electromechanical systems (MEMS) by modeling them as elastic membranes. The nonlinear Poisson equation governing their deformations is solved numerically by the meshless local Petrov-Galerkin (MLPG) method. A local symmetric augmented weak formulation of the problem is introduced, and essential boundary conditions are enforced by introducing a set of Lagrange multipliers. The trial functions are constructed by using the moving least-squares approximation, and the test functions are chosen from a space of functions different from the space of trial solutions. The resulting nonlinear system of equations is solved by using the pseudoarclength continuation method. Presently computed values of the pull-in voltage and the maximum pull-in deflection for the rectangular and the circular MEMS are found to agree very well with those available in the literature; results for the elliptic MEMS are new.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 949-962 |
| Number of pages | 14 |
| Journal | Engineering Analysis with Boundary Elements |
| Volume | 30 |
| Issue number | 11 |
| DOIs | |
| State | Published - Nov 2006 |
Keywords
- Meshless method
- Micro-electromechanical systems
- Pseudoarclength continuation method
- Pull-in instability
ASJC Scopus subject areas
- Analysis
- General Engineering
- Computational Mathematics
- Applied Mathematics