Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Nancy Missert; Paul G. Kotula; Michael Rye; Laura Rehm; Volker Sluka; Andrew D. Kent; Daniel Yohannes; Alex F. Kirichenko; Igor V. Vernik; Oleg A. Mukhanov; Vladimir Bolkhovsky; Alex Wynn; Leonard Johnson; Mark Gouker

doi:10.1109/TASC.2017.2669579

Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Nancy Missert, Paul G. Kotula, Michael Rye, Laura Rehm, Volker Sluka, Andrew D. Kent, Daniel Yohannes, Alex F. Kirichenko, Igor V. Vernik, Oleg A. Mukhanov, Vladimir Bolkhovsky, Alex Wynn, Leonard Johnson, Mark Gouker

Research output: Contribution to journal › Article › peer-review

Abstract

A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

Original language	English (US)
Article number	7857006
Journal	IEEE Transactions on Applied Superconductivity
Volume	27
Issue number	4
DOIs	https://doi.org/10.1109/TASC.2017.2669579
State	Published - Jun 2017

Keywords

Josephson junctions
magnetic multilayers
scanning transmission electron microscopy
superconducting materials

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TASC.2017.2669579

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Missert, N., Kotula, P. G., Rye, M., Rehm, L., Sluka, V., Kent, A. D., Yohannes, D., Kirichenko, A. F., Vernik, I. V., Mukhanov, O. A., Bolkhovsky, V., Wynn, A., Johnson, L., & Gouker, M. (2017). Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy. IEEE Transactions on Applied Superconductivity, 27(4), Article 7857006. https://doi.org/10.1109/TASC.2017.2669579

Missert, N, Kotula, PG, Rye, M, Rehm, L, Sluka, V, Kent, AD, Yohannes, D, Kirichenko, AF, Vernik, IV, Mukhanov, OA, Bolkhovsky, V, Wynn, A, Johnson, L & Gouker, M 2017, 'Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy', IEEE Transactions on Applied Superconductivity, vol. 27, no. 4, 7857006. https://doi.org/10.1109/TASC.2017.2669579

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title = "Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy",

abstract = "A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.",

keywords = "Josephson junctions, magnetic multilayers, scanning transmission electron microscopy, superconducting materials",

author = "Nancy Missert and Kotula, {Paul G.} and Michael Rye and Laura Rehm and Volker Sluka and Kent, {Andrew D.} and Daniel Yohannes and Kirichenko, {Alex F.} and Vernik, {Igor V.} and Mukhanov, {Oleg A.} and Vladimir Bolkhovsky and Alex Wynn and Leonard Johnson and Mark Gouker",

note = "Funding Information: This work was supported by the Office of the Director of National Intelligence, Intelligence Advanced Research Projects Activity. Publisher Copyright: {\textcopyright} 2002-2011 IEEE.",

year = "2017",

month = jun,

doi = "10.1109/TASC.2017.2669579",

language = "English (US)",

volume = "27",

journal = "IEEE Transactions on Applied Superconductivity",

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AU - Missert, Nancy

AU - Kotula, Paul G.

AU - Rye, Michael

AU - Rehm, Laura

AU - Sluka, Volker

AU - Kent, Andrew D.

AU - Yohannes, Daniel

AU - Kirichenko, Alex F.

AU - Vernik, Igor V.

AU - Mukhanov, Oleg A.

AU - Bolkhovsky, Vladimir

AU - Wynn, Alex

AU - Johnson, Leonard

AU - Gouker, Mark

PY - 2017/6

Y1 - 2017/6

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AB - A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

KW - Josephson junctions

KW - magnetic multilayers

KW - scanning transmission electron microscopy

KW - superconducting materials

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Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Abstract

Keywords

ASJC Scopus subject areas

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