Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Nancy Missert, Paul G. Kotula, Michael Rye, Laura Rehm, Volker Sluka, Andrew D. Kent, Daniel Yohannes, Alex F. Kirichenko, Igor V. Vernik, Oleg A. Mukhanov, Vladimir Bolkhovsky, Alex Wynn, Leonard Johnson, Mark Gouker

    Research output: Contribution to journalArticle

    Abstract

    A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

    Original languageEnglish (US)
    Article number7857006
    JournalIEEE Transactions on Applied Superconductivity
    Volume27
    Issue number4
    DOIs
    StatePublished - Jun 2017

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    Keywords

    • Josephson junctions
    • magnetic multilayers
    • scanning transmission electron microscopy
    • superconducting materials

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

    Cite this

    Missert, N., Kotula, P. G., Rye, M., Rehm, L., Sluka, V., Kent, A. D., Yohannes, D., Kirichenko, A. F., Vernik, I. V., Mukhanov, O. A., Bolkhovsky, V., Wynn, A., Johnson, L., & Gouker, M. (2017). Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy. IEEE Transactions on Applied Superconductivity, 27(4), [7857006]. https://doi.org/10.1109/TASC.2017.2669579