@inproceedings{fbb20bb5394041c9888b5c836565df88,
title = "Application of PET plastics in micro-sensor fabrication",
abstract = "Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.",
keywords = "Amorphous materials, Annealing, Electron beams, Etching, Fabrication, Plastics, Positron emission tomography, Substrates, Temperature distribution, X-ray scattering",
author = "Makki, {B. S.} and M. Kargar and S. Mohajerzadeh and T. Maleki and D. Shahrjerdi",
note = "Publisher Copyright: {\textcopyright} 2003 ICM.; 15th International Conference on Microelectronics, ICM 2003 ; Conference date: 09-12-2003 Through 11-12-2003",
year = "2003",
doi = "10.1109/ICM.2003.237932",
language = "English (US)",
series = "Proceedings of the International Conference on Microelectronics, ICM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "357--360",
booktitle = "Proceedings of the 15th International Conference on Microelectronics, ICM 2003",
}