Application of PET plastics in micro-sensor fabrication

B. S. Makki, M. Kargar, S. Mohajerzadeh, T. Maleki, D. Shahrjerdi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Polycrystalline germanium-based thermopiles are fabricated at reduced temperatures on plastic substrate. The Amorphous Ge film, deposited using electron beam evaporation, is post-treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120 to 175°C. The physical characteristics of Ge films have been investigated using XRD and SEM tools confirming the crystallinity of the annealed films. A Seebeck value of 100 μV/°C is extracted for the Ge-Al junctions. A novel ultraviolet assisted micro-machining is presented in which anisotropic etching of PET plastic substrate is achieved. The etching of plastic is performed in a DMF solution and in presence of ultraviolet light illumination with a typical intensity of 15 mW/hr measured at a wavelength of 360 nm. This technique has been applied to realize square membrane, craters, micro-gears and micro-molds.

Original languageEnglish (US)
Title of host publicationProceedings of the 15th International Conference on Microelectronics, ICM 2003
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9770520101
StatePublished - 2003
Event15th International Conference on Microelectronics, ICM 2003 - Cairo, Egypt
Duration: Dec 9 2003Dec 11 2003

Publication series

NameProceedings of the International Conference on Microelectronics, ICM


Other15th International Conference on Microelectronics, ICM 2003


  • Amorphous materials
  • Annealing
  • Electron beams
  • Etching
  • Fabrication
  • Plastics
  • Positron emission tomography
  • Substrates
  • Temperature distribution
  • X-ray scattering

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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