Application of set membership identification for fault detection of MEMS

Vasso Reppa, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.

Original languageEnglish (US)
Title of host publicationProceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Pages643-648
Number of pages6
DOIs
StatePublished - 2006
Event2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States
Duration: May 15 2006May 19 2006

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
Volume2006
ISSN (Print)1050-4729

Other

Other2006 IEEE International Conference on Robotics and Automation, ICRA 2006
CountryUnited States
CityOrlando, FL
Period5/15/065/19/06

Keywords

  • Fault detection
  • MEMS
  • Set membership identification

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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