TY - GEN
T1 - Application of set membership identification for fault detection of MEMS
AU - Reppa, Vasso
AU - Tzes, Anthony
PY - 2006
Y1 - 2006
N2 - In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.
AB - In this article, a set membership (SM) identification technique is tailored to detect faults in micro-electromechanical systems. The SM-identifier estimates an orthotope which contains the system's parameter vector. Based on this orthotope, the system's output interval is predicted. If the actual output is outside of this interval, then a fault is detected. Utilization of this scheme can discriminate mechanical-component faults from electronic component variations frequently encountered in MEMS. For testing the suggested algorithm's performance in simulation studies, an interface between classical control-software (MATLAB) and circuit emulation (HSPICE) is developed.
KW - Fault detection
KW - MEMS
KW - Set membership identification
UR - http://www.scopus.com/inward/record.url?scp=33845643190&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33845643190&partnerID=8YFLogxK
U2 - 10.1109/ROBOT.2006.1641783
DO - 10.1109/ROBOT.2006.1641783
M3 - Conference contribution
AN - SCOPUS:33845643190
SN - 0780395069
SN - 9780780395060
T3 - Proceedings - IEEE International Conference on Robotics and Automation
SP - 643
EP - 648
BT - Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
T2 - 2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Y2 - 15 May 2006 through 19 May 2006
ER -