Aspheric optics at different quality levels and functional need

K. Becker, B. Doerband, R. Loercher, M. Schmidt

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The design of optical systems gains profit from the application of aspheric elements: to correct for image aberrations, to reduce weight or system length or to cope with other functional needs like the number of reflections or the field size. Manufacturing, however, is suffering in practice from problems resulting from the reduced symmetry of the components as compared to spherical optics. Almost all large optical companies in the world are working on solving the problem of fabrication of accurate aspherical elements at reasonable cost. In this paper fabrication and metrology aspects of aspherical elements (mirrors and lenses) in the IR, visible, UV and EUV at Carl Zeiss and others companies will be discussed. The specifications achieved presently are ranging between some μm to nm for figure accuracy and 100 nm to 0.1 nm for microroughness.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages22-33
Number of pages12
Volume3739
StatePublished - 1999
EventProceedings of the 1999 Optical Fabrication and Testing - Berlin, Ger
Duration: May 26 1999May 28 1999

Other

OtherProceedings of the 1999 Optical Fabrication and Testing
CityBerlin, Ger
Period5/26/995/28/99

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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