Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications

Davood Shahrjerdi, Tank Akyol, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationElectronic Material Conference, 2007
StatePublished - 2007

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