Davood Shahrjerdi, Tank Akyol, Sanjay K. Banerjee
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications. / Shahrjerdi, Davood; Akyol, Tank; Banerjee, Sanjay K.
TY - GEN
T1 - Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications
AU - Shahrjerdi, Davood
AU - Akyol, Tank
AU - Banerjee, Sanjay K.
PY - 2007
Y1 - 2007
M3 - Conference contribution
BT - Electronic Material Conference, 2007