Original language | English (US) |
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Title of host publication | Electronic Material Conference, 2007 |
State | Published - 2007 |
Atomic layer deposition of AI203 and Hf02 on GaAs for MOSFET applications
Davood Shahrjerdi, Tank Akyol, Sanjay K. Banerjee
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution