| Original language | English (US) |
|---|---|
| Title of host publication | 38th IEEE Semiconductor Interface Specialist Conference, 2007 |
| State | Published - 2007 |
Atomic layer deposition of AI203 on GaAs substrates
Davood Shahrjerdi, Shawn S. Coffee, John G. Ekerdt, Sanjay K. Banerjee
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution