@inproceedings{70d70efcbe3d4ece90cc3907137f500e,
title = "Beol scaling limits and next generation technology prospects",
abstract = "This paper presents the major limitations to the interconnect technology scaling at future technology generations and demonstrates both evolutionary and radical potential solutions to the BEOL scaling problem. To address the local interconnect challenges, a novel hybrid Al-Cu interconnect technology is introduced. Performances of carbon-based interconnects are evaluated as a more radical solution. The impact of interconnects and the optimal interconnect options are investigated for emerging next generation devices. Interconnects for new state variables, namely spintronic interconnects, are studied and their potential performances in an all-spin logic system are evaluated.",
keywords = "All-spin logic, Carbon-based interconnects, Emerging FETS, Hybrid Al-Cu interconnects, New state variables, Spintronic interconnects",
author = "Azad Naeemi and Chenyun Pan and Ahmet Ceyhan and Iraei, {Rouhollah M.} and Vachan Kumar and Shaloo Rakheja",
year = "2014",
doi = "10.1145/2593069.2596672",
language = "English (US)",
isbn = "9781479930173",
series = "Proceedings - Design Automation Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "DAC 2014 - 51st Design Automation Conference, Conference Proceedings",
note = "51st Annual Design Automation Conference, DAC 2014 ; Conference date: 02-06-2014 Through 05-06-2014",
}