Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer

Zakriya Mohammed; Ghada Dushaq; Aveek Chatterjee; Mahmoud Rasras

doi:10.1109/EuroSimE.2016.7463335

Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer

Zakriya Mohammed, Ghada Dushaq, Aveek Chatterjee, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper demonstrates the design and simulation of a 2-axis capacitive accelerometer. The design utilizes a simple comb structure to detect capacitance change with a minimum gap spacing of 0.9 μm. By optimizing the design and anti-gap spacing, the device is designed to yield high capacitance change with the proof mass displacement. Initial simulation results show a displacement sensitivity of 0.02μm/g (g=9.8 m/s²) and a differential capacitance sensitivity (scale factor) of 68 fF/g. The sensitivity achieved is best among the devices of its range (± 5g) and dimensions (2×2mm²). This device is being fabricated by GlobalFoundries-Singapore.

Original language	English (US)
Title of host publication	2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509021062
DOIs	https://doi.org/10.1109/EuroSimE.2016.7463335
State	Published - Apr 29 2016
Event	17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016 - Montpellier, France Duration: Apr 18 2016 → Apr 20 2016

Publication series

Name	2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016

Other

Other	17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016
Country/Territory	France
City	Montpellier
Period	4/18/16 → 4/20/16

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Surfaces, Coatings and Films
Modeling and Simulation
Safety, Risk, Reliability and Quality
Industrial and Manufacturing Engineering

Access to Document

10.1109/EuroSimE.2016.7463335

Cite this

Mohammed, Z., Dushaq, G., Chatterjee, A., & Rasras, M. (2016). Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016 [7463335] (2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EuroSimE.2016.7463335

Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer. / Mohammed, Zakriya; Dushaq, Ghada; Chatterjee, Aveek et al.

2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016. Institute of Electrical and Electronics Engineers Inc., 2016. 7463335 (2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mohammed, Z, Dushaq, G, Chatterjee, A & Rasras, M 2016, Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer. in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016., 7463335, 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016, Institute of Electrical and Electronics Engineers Inc., 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016, Montpellier, France, 4/18/16. https://doi.org/10.1109/EuroSimE.2016.7463335

Mohammed Z, Dushaq G, Chatterjee A, Rasras M. Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016. Institute of Electrical and Electronics Engineers Inc. 2016. 7463335. (2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016). doi: 10.1109/EuroSimE.2016.7463335

Mohammed, Zakriya ; Dushaq, Ghada ; Chatterjee, Aveek et al. / Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer. 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016. Institute of Electrical and Electronics Engineers Inc., 2016. (2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2016).

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abstract = "This paper demonstrates the design and simulation of a 2-axis capacitive accelerometer. The design utilizes a simple comb structure to detect capacitance change with a minimum gap spacing of 0.9 μm. By optimizing the design and anti-gap spacing, the device is designed to yield high capacitance change with the proof mass displacement. Initial simulation results show a displacement sensitivity of 0.02μm/g (g=9.8 m/s2) and a differential capacitance sensitivity (scale factor) of 68 fF/g. The sensitivity achieved is best among the devices of its range (± 5g) and dimensions (2×2mm2). This device is being fabricated by GlobalFoundries-Singapore.",

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N2 - This paper demonstrates the design and simulation of a 2-axis capacitive accelerometer. The design utilizes a simple comb structure to detect capacitance change with a minimum gap spacing of 0.9 μm. By optimizing the design and anti-gap spacing, the device is designed to yield high capacitance change with the proof mass displacement. Initial simulation results show a displacement sensitivity of 0.02μm/g (g=9.8 m/s2) and a differential capacitance sensitivity (scale factor) of 68 fF/g. The sensitivity achieved is best among the devices of its range (± 5g) and dimensions (2×2mm2). This device is being fabricated by GlobalFoundries-Singapore.

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Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer

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