Block copolymer lithography: Periodic arrays of ~10¹¹ holes in 1 square centimeter

Keyphrases

• Average Grain Size 50%
• Cylindrical Microdomain 50%
• Lithography Technique 50%
• Microdomain 50%
• Semiconductor Lithography 50%
• Silicon Nitride 50%
• Silicon Nitride Layer 50%
• Spherical Microdomain 50%
• Spontaneous Self-assembly 50%
• Surface Patterning 50%
• Synthetic Materials 50%

Engineering

• Average Grain Size 33%
• Complementary Technique 33%
• Nitride Layer 33%
• Semiconductor Lithography 33%
• Silicon Wafer 33%
• Square Centimeter 100%
• Synthetic Material 33%

Material Science

• Semiconductor Lithography 50%
• Silicon Nitride 100%
• Silicon Wafer 50%
• Surface Patterning 50%