Block copolymer nanolithography

M. Trawick, D. Angelescu, P. Chaikin, R. Register

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	English (US)
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd
Pages	1-38
Number of pages	38
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.1
State	Published - Sep 2005

ASJC Scopus subject areas

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title = "Block copolymer nanolithography",

author = "M. Trawick and D. Angelescu and P. Chaikin and R. Register",

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AU - Angelescu, D.

AU - Chaikin, P.

AU - Register, R.

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EP - 38

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd

ER -