Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

M. Probst, H. Deutsch, K. Becker, T. D. Märk

Research output: Contribution to journalArticlepeer-review

Abstract

The Deutsch-Märk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO2, BF3, BCl3, HX (X = F, Cl, Br, J), Br2, J2, WF6, GeHx (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).

Original languageEnglish (US)
Pages (from-to)13-25
Number of pages13
JournalInternational Journal of Mass Spectrometry
Volume206
Issue number1-2
DOIs
StatePublished - Feb 26 2001

Keywords

  • Cross-section calculations
  • Electron-impact ionization
  • Molecules

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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