Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

M. Probst; H. Deutsch; K. Becker; T. D. Märk

doi:10.1016/S1387-3806(00)00379-1

Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

M. Probst, H. Deutsch, K. Becker, T. D. Märk

Research output: Contribution to journal › Article › peer-review

Abstract

The Deutsch-Märk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO₂, BF₃, BCl₃, HX (X = F, Cl, Br, J), Br₂, J₂, WF₆, GeH_x (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).

Original language	English (US)
Pages (from-to)	13-25
Number of pages	13
Journal	International Journal of Mass Spectrometry
Volume	206
Issue number	1-2
DOIs	https://doi.org/10.1016/S1387-3806(00)00379-1
State	Published - Feb 26 2001

Keywords

Cross-section calculations
Electron-impact ionization
Molecules

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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10.1016/S1387-3806(00)00379-1

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title = "Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism",

abstract = "The Deutsch-M{\"a}rk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO2, BF3, BCl3, HX (X = F, Cl, Br, J), Br2, J2, WF6, GeHx (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).",

keywords = "Cross-section calculations, Electron-impact ionization, Molecules",

author = "M. Probst and H. Deutsch and K. Becker and M{\"a}rk, {T. D.}",

note = "Funding Information: This work has been carried out within the Association EURATOM-{\"O}AW and was partially supported by the FWF, Wien, Austria. K.B. acknowledges partial financial support from the Division of Chemical Sciences, Office of Basic Energy Sciences, Office of Science, U.S. Department of Energy.",

year = "2001",

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doi = "10.1016/S1387-3806(00)00379-1",

language = "English (US)",

volume = "206",

pages = "13--25",

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T1 - Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

AU - Probst, M.

AU - Deutsch, H.

AU - Becker, K.

AU - Märk, T. D.

N1 - Funding Information: This work has been carried out within the Association EURATOM-ÖAW and was partially supported by the FWF, Wien, Austria. K.B. acknowledges partial financial support from the Division of Chemical Sciences, Office of Basic Energy Sciences, Office of Science, U.S. Department of Energy.

PY - 2001/2/26

Y1 - 2001/2/26

N2 - The Deutsch-Märk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO2, BF3, BCl3, HX (X = F, Cl, Br, J), Br2, J2, WF6, GeHx (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).

AB - The Deutsch-Märk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO2, BF3, BCl3, HX (X = F, Cl, Br, J), Br2, J2, WF6, GeHx (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).

KW - Cross-section calculations

KW - Electron-impact ionization

KW - Molecules

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U2 - 10.1016/S1387-3806(00)00379-1

DO - 10.1016/S1387-3806(00)00379-1

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AN - SCOPUS:0035952251

SN - 1387-3806

VL - 206

SP - 13

EP - 25

JO - International Journal of Mass Spectrometry

JF - International Journal of Mass Spectrometry

IS - 1-2

ER -

Calculations of absolute electron-impact ionization cross sections for molecules of technological relevance using the DM formalism

Abstract

Keywords

ASJC Scopus subject areas

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