The Deutsch-Märk (DM) formalism has been used to calculate absolute electron impact ionization cross sections for the technologically relevant molecules NO2, BF3, BCl3, HX (X = F, Cl, Br, J), Br2, J2, WF6, GeHx (x = 1-4), TMS (tetramethylsilane), HMDSO (hexamethyldisiloxane), and TEOS (tetraethoxysilane). Our calculations are compared with experimental data, where available, and with calculated cross sections based on the Binary-Encounter-Bethe (BEB) method of Kim and Rudd. In some cases, comparisons are also made with predictions from the modified additivity rule (MAR).
- Cross-section calculations
- Electron-impact ionization
ASJC Scopus subject areas
- Condensed Matter Physics
- Physical and Theoretical Chemistry