Capacitance estimate for electrostatically actuated narrow microbeams' (Micro and Nano Letters (2006) 1, 2, (71-73))

R. C. Batra, M. Pofiri, D. Spinello

Research output: Contribution to journalComment/debatepeer-review

Original languageEnglish (US)
Number of pages1
JournalMicro and Nano Letters
Volume2
Issue number4
DOIs
StatePublished - 2007

ASJC Scopus subject areas

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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