CMOS-compatible Si-ring-assisted Mach-Zehnder interferometer with internal bandwidth equalization

Douglas M. Gill, Sanjay S. Patel, Mahmoud Rasras, Kun Yii Tu, Alice E. White, Young Kai Chen, Andrew Pomerene, Daniel Carothers, Robert L. Kamocsai, Craig M. Hill, James Beattie

Research output: Contribution to journalArticlepeer-review


We demonstrate, to the best of our knowledge, the first electrooptic ring-assisted MachZehnder interferometric (RAMZI) modulator in a CMOS-compatible technology. The RAMZI modulator is manufactured on a CMOS-compatible platform and entirely fabricated in a commercial CMOS foundry. We demonstrate a small-signal 3-dB bandwidth 15 GHz in a silicon-based carrier-depletion modulator with a 2-Vcm VπL product, which is approximately two times smaller than previously reported. We achieved a 10-Gb/s eye diagram with a 2-dB extinction ratio using a 4-Vp-p drive in a modulator with a 680-μm optic/RF interaction region. In addition, we demonstrate internal bandwidth equalization within the tunable CMOS-compatible RAMZI modulator, and discuss the optical carrier and modulation sideband response, and relaxation characteristics that lead to this behavior within resonant modulators.

Original languageEnglish (US)
Article number5325706
Pages (from-to)45-52
Number of pages8
JournalIEEE Journal on Selected Topics in Quantum Electronics
Issue number1
StatePublished - Jan 2010


  • Electrooptic modulation
  • Integrated optics
  • Integrated optoelectronics
  • Resonators
  • Ridged waveguides

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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