TY - JOUR
T1 - Collisional and radiative processes in high-pressure Ne/N2 discharges
AU - Martus, K.
AU - Masoud, N.
AU - Becker, K.
PY - 2006/5/1
Y1 - 2006/5/1
N2 - Optical emission spectroscopy was used to investigate collisional and radiative processes in a high-pressure cylindrical dielectric barrier discharge excited by radio frequency power at 13.56 MHz in gas mixtures containing Ne and N2. Emissions attributable to N2, and N were analysed in three regions ranging from 70-120 nm, 120-180 nm, and 330-365 nm. The dependence of the intensities of the various emission features from the discharge plasma on the plasma operating parameters (pressure, power, gas mixture) are explained in terms of the energy transfer channels from Ne metastables and excimers to N2. We compare the observations from the Ne/N2 plasmas to those obtained earlier for Ar/N2 plasmas.
AB - Optical emission spectroscopy was used to investigate collisional and radiative processes in a high-pressure cylindrical dielectric barrier discharge excited by radio frequency power at 13.56 MHz in gas mixtures containing Ne and N2. Emissions attributable to N2, and N were analysed in three regions ranging from 70-120 nm, 120-180 nm, and 330-365 nm. The dependence of the intensities of the various emission features from the discharge plasma on the plasma operating parameters (pressure, power, gas mixture) are explained in terms of the energy transfer channels from Ne metastables and excimers to N2. We compare the observations from the Ne/N2 plasmas to those obtained earlier for Ar/N2 plasmas.
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U2 - 10.1088/0963-0252/15/2/S11
DO - 10.1088/0963-0252/15/2/S11
M3 - Article
AN - SCOPUS:33646413923
SN - 0963-0252
VL - 15
SP - S84-S90
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 2
ER -