Compact floating ion energy analyzer for measuring energy distributions of ions bombarding radio-frequency biased electrode surfaces

Erik A. Edelberg, Andrew Perry, Neil Benjamin, Eray S. Aydil

Research output: Contribution to journalArticle

Abstract

The energy distribution of ions bombarding radio-frequency biased electrodes in high-density plasma reactors are measured using a compact floating retarding ion energy analyzer. The design of the analyzer, its operation and capabilities are discussed.

Original languageEnglish (US)
Pages (from-to)2689-2698
Number of pages10
JournalReview of Scientific Instruments
Volume70
Issue number6
DOIs
StatePublished - Jun 1999

ASJC Scopus subject areas

  • Instrumentation

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