Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

E. Riedo; F. Comin; J. Chevrier; A. M. Bonnot

doi:10.1063/1.1309041

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

E. Riedo, F. Comin, J. Chevrier, A. M. Bonnot

Chemical and Biomolecular Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CN_x) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm²). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp³-bonded carbon sites in the DLC films and an increase in N-sp³ C bonded sites in the CN_x films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CN_x films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

Original language	English (US)
Pages (from-to)	4365-4370
Number of pages	6
Journal	Journal of Applied Physics
Volume	88
Issue number	7
DOIs	https://doi.org/10.1063/1.1309041
State	Published - Oct 2000

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1309041

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title = "Composition and chemical bonding of pulsed laser deposited carbon nitride thin films",

abstract = "We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.",

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T1 - Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

AU - Riedo, E.

AU - Comin, F.

AU - Chevrier, J.

AU - Bonnot, A. M.

PY - 2000/10

Y1 - 2000/10

N2 - We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

AB - We studied composition, structure, and growth parameters of amorphous diamond-like carbon (DLC) and carbon nitride (CNx) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0≤N/C≤0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences (1-12 J/cm2). Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp3-bonded carbon sites in the DLC films and an increase in N-sp3 C bonded sites in the CNx films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of C≡N bonds in the CNx films. Furthermore, we observed that keeping the nitrogen pressure constant (P = 100 mTorr) the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

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Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

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