Computational analysis of input-shaping control of torsional microelectromechanical mirrors

Starling Thomas, Mohammed F. Daqaq, Gang Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Input-shaping is an open-loop control technique for dynamic control of electrostatic MEMS. In MEMS applications, open- loop control is attractive as it computes a priori the required system input to achieve desired dynamic behavior without using feedback. In this work, a 3-D computational electromechanical analysis is performed to preshape the voltage commands applied to electrostatically actuate a torsional micromirror to a desired tilt angle with minimal residual oscillations. The effect of higher vibration modes on the controlled response is also investigated. We show that, depending on the design of the micromirros, the first bending mode of the micromirror structures can have significant effect on the dynamic behavior of the system, which is difficidt to suppress by using the step-voltage open-loop control. We employ a numerical optimization procedure to shape the input voltage from the real time dynamic response of the mirror structures. The optimization procedure results in a periodic nonlinear input voltage design that can effectively suppress the bending mode effect.

Original languageEnglish (US)
Title of host publicationProceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages203-204
Number of pages2
EditionPART A
ISBN (Print)9780791843857
DOIs
StatePublished - 2010
EventASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 - Lake Buena Vista, FL, United States
Duration: Nov 13 2009Nov 19 2009

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
NumberPART A
Volume12

Other

OtherASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009
CountryUnited States
CityLake Buena Vista, FL
Period11/13/0911/19/09

ASJC Scopus subject areas

  • Mechanical Engineering

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