@article{dcf92d6c07f5484cb280b9c516282e8b,
title = "Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer",
abstract = "This paper presents design optimization, numerical modelling, fabrication and characterization of a single-axis comb drive MEMS gap-changeable differential capacitive accelerometer with a compact footprint of 2 mm × 2 mm. High sensitivity is achieved by optimizing the ratio of the anti-finger gap to finger gap spacing. It is found that a gap ratio of 3.44 leads to a displacement sensitivity of 0.0139 µm/g and a capacitive sensitivity of 80 fF/g. Finite element analysis is used to find the mode shape and frequency. Scanning electron microscope and capacitance-voltage measurements are employed to confirm the devices work. An enlarged static capacitance of 14.46 ± 0.42 pF is measured due to the enlarged stator anchor width. Electrical sensitivity of 35.93 mV/g is obtained by using the capacitance readout circuit at the system level, and the electrical sensitivity is practically constant over the frequency range of 100–200 Hz.",
keywords = "Accelerometer, Anti-gap spacing, Capacitive sensitivity, Comb fingers, MEMS",
author = "Ru Li and Zakriya Mohammed and Mahmoud Rasras and Elfadel, {Ibrahim (Abe) M.} and Daniel Choi",
note = "Funding Information: This work was funded in-part by Mubadala Development Company?Abu Dhabi, Economic Development Board-Singapore and GlobalFoundries-Singapore under the framework of 'Twinlab' project with the participation of A*STAR Institute of Microelectronics-Singapore, Khalifa university-Abu Dhabi and GlobalFoundries - Singapore, and in part, by Takreer Company ? Abu Dhabi, under the project entitled as ?Smart Sensor for Catalytic Bed Reactor Refinery (Khalifa University Project Code: 8434000152)?. Funding Information: This work was funded in-part by Mubadala Development Company–Abu Dhabi, Economic Development Board-Singapore and GlobalFoundries-Singapore under the framework of 'Twinlab' project with the participation of A*STAR Institute of Microelectronics-Singapore, Khalifa university-Abu Dhabi and GlobalFoundries - Singapore, and in part, by Takreer Company – Abu Dhabi, under the project entitled as “Smart Sensor for Catalytic Bed Reactor Refinery (Khalifa University Project Code: 8434000152)”. Publisher Copyright: {\textcopyright} 2020",
year = "2021",
month = feb,
doi = "10.1016/j.measurement.2020.108377",
language = "English (US)",
volume = "169",
journal = "Measurement: Journal of the International Measurement Confederation",
issn = "0263-2241",
}