Development of a shock acceleration microswitch with enhanced-contact and low off-axis sensitivity

Z. Q. Yang, G. F. Ding, H. G. Cai, H. Wang, W. Q. Chen, X. L. Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the present work, microswitches with different shapes have been fabricated by low-cost and convenient multi-layer electroplating in order to develop a shock acceleration microswitch with enhanced-contact and low off-axis sensitivity. Modal analysis based on FEM shows that the three kinds of new designed microswitches have lower off-axis sensitivity than our previous device, i.e., type I. The packaged microswitches were tested by the drop hammer system. The generated half-sine-like shocking acceleration with amplitude of 80g, lager than the threshold, was applied to the microswitches. The test contact time of the microswitch IV is about 55μs, whose contact effect is much better than conventional. A shock acceleration microswitch ‡W with a movable contact point utilizes the double spring-mass system to realize an enhanced-contact effect and is considered as a better selection for long duration contact and relatively low off-axis sensitivity.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1940-1943
Number of pages4
DOIs
StatePublished - 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

Keywords

  • Acceleration microswitch
  • Enhanced-contact
  • MEMS

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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