Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Suenne Kim, Yaser Bastani, Haidong Lu, William P. King, Seth Marder, Kenneth H. Sandhage, Alexei Gruverman, Elisa Riedo, Nazanin Bassiri-Gharb

Research output: Contribution to journalArticlepeer-review

Abstract

A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.

Original languageEnglish (US)
Pages (from-to)3786-3790
Number of pages5
JournalAdvanced Materials
Volume23
Issue number33
DOIs
StatePublished - Sep 1 2011

Keywords

  • ferroelectric materials
  • nanomanufacturing
  • piezoelectric materials
  • thermochemical nanolithography

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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