Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Suenne Kim; Yaser Bastani; Haidong Lu; William P. King; Seth Marder; Kenneth H. Sandhage; Alexei Gruverman; Elisa Riedo; Nazanin Bassiri-Gharb

doi:10.1002/adma.201101991

Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Suenne Kim, Yaser Bastani, Haidong Lu, William P. King, Seth Marder, Kenneth H. Sandhage, Alexei Gruverman, Elisa Riedo, Nazanin Bassiri-Gharb

Chemical and Biomolecular Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr_0.52Ti _0.48)O₃and PbTiO₃ ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in^-2 are produced.

Original language	English (US)
Pages (from-to)	3786-3790
Number of pages	5
Journal	Advanced Materials
Volume	23
Issue number	33
DOIs	https://doi.org/10.1002/adma.201101991
State	Published - Sep 1 2011

Keywords

ferroelectric materials
nanomanufacturing
piezoelectric materials
thermochemical nanolithography

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.201101991

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title = "Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates",

abstract = "A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.",

keywords = "ferroelectric materials, nanomanufacturing, piezoelectric materials, thermochemical nanolithography",

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T1 - Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

AU - Kim, Suenne

AU - Bastani, Yaser

AU - Lu, Haidong

AU - King, William P.

AU - Marder, Seth

AU - Sandhage, Kenneth H.

AU - Gruverman, Alexei

AU - Riedo, Elisa

AU - Bassiri-Gharb, Nazanin

PY - 2011/9/1

Y1 - 2011/9/1

N2 - A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.

AB - A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti 0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ∼30 nm, spheres with diameter ∼10 nm, and densities up to 213 Gb in-2 are produced.

KW - ferroelectric materials

KW - nanomanufacturing

KW - piezoelectric materials

KW - thermochemical nanolithography

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Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Abstract

Keywords

ASJC Scopus subject areas

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