Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer

Zakriya Mohammed; Waqas A. Gill; Mahmoud Rasras

doi:10.1109/LSENS.2017.2756108

Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer

Zakriya Mohammed, Waqas A. Gill, Mahmoud Rasras

Research output: Contribution to journal › Article › peer-review

Abstract

We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97fFg (g= 9.8 m²10 grange with a pull-in voltage of 6V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm 1.6 mm using GlobalFoundries Inertial Measurement Unit (IMU) platform.

Original language	English (US)
Article number	8049404
Journal	IEEE Sensors Letters
Volume	1
Issue number	5
DOIs	https://doi.org/10.1109/LSENS.2017.2756108
State	Published - Oct 2017

Keywords

accelerometers
cross-axis sensitivity
differential capacitance
Mechanical sensors
mode spacing
sensitivity

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

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10.1109/LSENS.2017.2756108

Cite this

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title = "Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer",

abstract = "We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97fFg (g= 9.8 m210 grange with a pull-in voltage of 6V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm 1.6 mm using GlobalFoundries Inertial Measurement Unit (IMU) platform.",

keywords = "accelerometers, cross-axis sensitivity, differential capacitance, Mechanical sensors, mode spacing, sensitivity",

author = "Zakriya Mohammed and Gill, {Waqas A.} and Mahmoud Rasras",

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AU - Mohammed, Zakriya

AU - Gill, Waqas A.

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PY - 2017/10

Y1 - 2017/10

N2 - We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97fFg (g= 9.8 m210 grange with a pull-in voltage of 6V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm 1.6 mm using GlobalFoundries Inertial Measurement Unit (IMU) platform.

AB - We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97fFg (g= 9.8 m210 grange with a pull-in voltage of 6V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm 1.6 mm using GlobalFoundries Inertial Measurement Unit (IMU) platform.

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KW - differential capacitance

KW - Mechanical sensors

KW - mode spacing

KW - sensitivity

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Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer

Abstract

Keywords

ASJC Scopus subject areas

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