Double-Comb-Finger Design to Eliminate Cross-Axis Sensitivity in a Dual-Axis Accelerometer

Zakriya Mohammed, Waqas A. Gill, Mahmoud Rasras

Research output: Contribution to journalArticlepeer-review


We present a dual-axis accelerometer with zero cross-axis sensitivity. In general, multiaxis accelerometers with single proof-mass have multiple degrees of freedom, making them susceptible to high cross-axis sensitivity. In this article, a novel differential capacitive finger scheme is presented, which fully eliminates the in-plane cross-axis sensitivity at the device level. The proposed accelerometer is highly sensitive and has a differential capacitance scale factor of 80.97fFg (g= 9.8 m210 grange with a pull-in voltage of 6V. Additionally, the out-of-plane motion due to acceleration in the Z-axis direction is significantly suppressed due to the high-spring constant in that direction. The device is fabricated in a compact footprint of 1.6 mm 1.6 mm using GlobalFoundries Inertial Measurement Unit (IMU) platform.

Original languageEnglish (US)
Article number8049404
JournalIEEE Sensors Letters
Issue number5
StatePublished - Oct 2017


  • accelerometers
  • cross-axis sensitivity
  • differential capacitance
  • Mechanical sensors
  • mode spacing
  • sensitivity

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering


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