Effect of chamber wall conditions on Cl and Cl2 concentrations in an inductively coupled plasma reactor

Saurabh J. Ullal; Anna R. Godfrey; Erik Edelberg; Linda Braly; Vahid Vahedi; Eray S. Aydil

doi:10.1116/1.1421602

Effect of chamber wall conditions on Cl and Cl₂ concentrations in an inductively coupled plasma reactor

Saurabh J. Ullal, Anna R. Godfrey, Erik Edelberg, Linda Braly, Vahid Vahedi, Eray S. Aydil

Chemical and Biomolecular Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The effect of chamber wall conditions on the gas phase composition of a Cl₂ plasma was studied in an inductively coupled plasma reactor. Gas phase Cl and Cl₂ concentrations were determined by optical emission spectroscopy in conjunction with actinometry. Overall, the results highlight the importance of controlling the chamber wall conditions and its significant effects on the plasma composition.

Original language	English (US)
Pages (from-to)	43-52
Number of pages	10
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	20
Issue number	1
DOIs	https://doi.org/10.1116/1.1421602
State	Published - Jan 2002

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "The effect of chamber wall conditions on the gas phase composition of a Cl2 plasma was studied in an inductively coupled plasma reactor. Gas phase Cl and Cl2 concentrations were determined by optical emission spectroscopy in conjunction with actinometry. Overall, the results highlight the importance of controlling the chamber wall conditions and its significant effects on the plasma composition.",

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AU - Vahedi, Vahid

AU - Aydil, Eray S.

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AB - The effect of chamber wall conditions on the gas phase composition of a Cl2 plasma was studied in an inductively coupled plasma reactor. Gas phase Cl and Cl2 concentrations were determined by optical emission spectroscopy in conjunction with actinometry. Overall, the results highlight the importance of controlling the chamber wall conditions and its significant effects on the plasma composition.

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Effect of chamber wall conditions on Cl and Cl₂ concentrations in an inductively coupled plasma reactor

Abstract

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