Effects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplates

Romesh C. Batra, Maurizio Porfiri, Davide Spinello

Research output: Contribution to journalArticlepeer-review

Abstract

We study the influence of von Kármán nonlinearity, van der Waals force, and thermal stresses on pull-in instability and small vibrations of electrostatically actuated microplates. We use the Galerkin method to develop a tractable reduced-order model for electrostatically actuated clamped rectangular microplates in the presence of van der Waals forces and thermal stresses. More specifically, we reduce the governing two-dimensional nonlinear transient boundary-value problem to a single nonlinear ordinary differential equation. For the static problem, the pull-in voltage and the pull-in displacement are determined by solving a pair of nonlinear algebraic equations. The fundamental vibration frequency corresponding to a deflected configuration of the microplate is determined by solving a linear algebraic equation. The proposed reduced-order model allows for accurately estimating the combined effects of van der Waals force and thermal stresses on the pull-in voltage and the pull-in deflection profile with an extremely limited computational effort.

Original languageEnglish (US)
Pages (from-to)1048-1069
Number of pages22
JournalSensors
Volume8
Issue number2
DOIs
StatePublished - Feb 2008

Keywords

  • Microelectromechanical systems
  • Microplate
  • Microsensor
  • Pull-in instability
  • Van der Waals force

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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