Electron cyclotron resonance plasma reactor for cryogenic etching

Eray S. Aydil, Jeffrey A. Gregus, Richard A. Gottscho

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Electron cyclotron resonance plasma reactor for cryogenic etching'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy