Electron impact ionization cross-sections of SF3 and SF 5

W. M. Huo; V. Tarnovsky; K. Becker

doi:10.1016/j.ijms.2003.12.011

Electron impact ionization cross-sections of SF₃ and SF ₅

W. M. Huo, V. Tarnovsky, K. Becker

Research output: Contribution to journal › Article › peer-review

Abstract

We report experimental and theoretical studies of the total electron impact ionization cross-sections for the radicals SF₃ and SF₅. It is shown that for radicals with strongly polar fluoride bonds, the shielding of the attractive dipole interaction potential in the bonding region is important in a proper description of the collision process. The siBED model, which has incorporated the shielding factor, was found to provide cross-sections in agreement with recently re-analyzed experimental data for the species CF_x and NF_x (x=1-3), whereas the DM model and the BEB model, on the other hand, showed large discrepancies with experiment. These findings also hold for the two free radicals SF₃ and SF₅ studied here, providing further evidence on the importance of a proper shielding of the dipole potential.

Original language	English (US)
Pages (from-to)	111-116
Number of pages	6
Journal	International Journal of Mass Spectrometry
Volume	233
Issue number	1-3
DOIs	https://doi.org/10.1016/j.ijms.2003.12.011
State	Published - Apr 15 2004

Keywords

Cross-sections
Electron ionization
Free radicals
Plasma processing

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

Access to Document

10.1016/j.ijms.2003.12.011

Cite this

@article{48a7bb3b5eb14b0bae5cb84ad7610129,

title = "Electron impact ionization cross-sections of SF3 and SF 5",

abstract = "We report experimental and theoretical studies of the total electron impact ionization cross-sections for the radicals SF3 and SF5. It is shown that for radicals with strongly polar fluoride bonds, the shielding of the attractive dipole interaction potential in the bonding region is important in a proper description of the collision process. The siBED model, which has incorporated the shielding factor, was found to provide cross-sections in agreement with recently re-analyzed experimental data for the species CFx and NFx (x=1-3), whereas the DM model and the BEB model, on the other hand, showed large discrepancies with experiment. These findings also hold for the two free radicals SF3 and SF5 studied here, providing further evidence on the importance of a proper shielding of the dipole potential.",

keywords = "Cross-sections, Electron ionization, Free radicals, Plasma processing",

author = "Huo, {W. M.} and V. Tarnovsky and K. Becker",

note = "Funding Information: The authors acknowledge helpful discussion with H. Deutsch, M. Probst, and T.D. M{\"a}rk as well as their willingness to make available unpublished data of DM calculations for the two targets studied here. Two of us (V.T., K.B.) would like to acknowledge partial financial support from the Division of Chemical Sciences, Office of Basic Energy Sciences, Office of Science, U.S. Department of Energy.",

year = "2004",

month = apr,

day = "15",

doi = "10.1016/j.ijms.2003.12.011",

language = "English (US)",

volume = "233",

pages = "111--116",

journal = "International Journal of Mass Spectrometry",

issn = "1387-3806",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Electron impact ionization cross-sections of SF3 and SF 5

AU - Huo, W. M.

AU - Tarnovsky, V.

AU - Becker, K.

N1 - Funding Information: The authors acknowledge helpful discussion with H. Deutsch, M. Probst, and T.D. Märk as well as their willingness to make available unpublished data of DM calculations for the two targets studied here. Two of us (V.T., K.B.) would like to acknowledge partial financial support from the Division of Chemical Sciences, Office of Basic Energy Sciences, Office of Science, U.S. Department of Energy.

PY - 2004/4/15

Y1 - 2004/4/15

N2 - We report experimental and theoretical studies of the total electron impact ionization cross-sections for the radicals SF3 and SF5. It is shown that for radicals with strongly polar fluoride bonds, the shielding of the attractive dipole interaction potential in the bonding region is important in a proper description of the collision process. The siBED model, which has incorporated the shielding factor, was found to provide cross-sections in agreement with recently re-analyzed experimental data for the species CFx and NFx (x=1-3), whereas the DM model and the BEB model, on the other hand, showed large discrepancies with experiment. These findings also hold for the two free radicals SF3 and SF5 studied here, providing further evidence on the importance of a proper shielding of the dipole potential.

AB - We report experimental and theoretical studies of the total electron impact ionization cross-sections for the radicals SF3 and SF5. It is shown that for radicals with strongly polar fluoride bonds, the shielding of the attractive dipole interaction potential in the bonding region is important in a proper description of the collision process. The siBED model, which has incorporated the shielding factor, was found to provide cross-sections in agreement with recently re-analyzed experimental data for the species CFx and NFx (x=1-3), whereas the DM model and the BEB model, on the other hand, showed large discrepancies with experiment. These findings also hold for the two free radicals SF3 and SF5 studied here, providing further evidence on the importance of a proper shielding of the dipole potential.

KW - Cross-sections

KW - Electron ionization

KW - Free radicals

KW - Plasma processing

UR - http://www.scopus.com/inward/record.url?scp=2142808708&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2142808708&partnerID=8YFLogxK

U2 - 10.1016/j.ijms.2003.12.011

DO - 10.1016/j.ijms.2003.12.011

M3 - Article

AN - SCOPUS:2142808708

SN - 1387-3806

VL - 233

SP - 111

EP - 116

JO - International Journal of Mass Spectrometry

JF - International Journal of Mass Spectrometry

IS - 1-3

ER -