This topical review examines the current status of the electron impact ionization of atoms, molecules, ions and transient species such as free radicals and atoms/molecules in metastable states from the point of a view of the relevance of these processes for the physics and chemistry of low-temperature and moderate-temperature plasmas. The primary emphasis of this review is on recent developments in the measurement (and to a lesser extent also in the calculation) of absolute total and partial angle-integrated electron impact ionization cross sections. An attempt is also made to identify the most promising directions for future research in this field.
|Original language||English (US)|
|Number of pages||9|
|Journal||Plasma Sources Science and Technology|
|State||Published - 1995|
ASJC Scopus subject areas
- Condensed Matter Physics