Original language | English (US) |
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Title of host publication | Fundamentals of plasma chemistry |
Editors | M. Inokuti, K. Becker |
Place of Publication | New York |
Publisher | Academic Press |
Pages | 147-184 |
State | Published - 2000 |
Electron-impact ionization of Si-organic compounds
R. Basner, M. Schmidt, Hans Deutsch, Kurt Becker
Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review