Electron impact ionization of tetramethylsilane (TMS)

Keyphrases

• Tetramethylsilane 100%
• Partial Ionization Cross Section 40%
• Crack Pattern 40%
• Mass Spectral 40%
• Plasma Polymerization 20%
• High-resolution 20%
• Methyl Groups 20%
• Double Focusing 20%
• Collision-induced 20%
• Ionic Product 20%
• Quadrupole Mass Spectrometer 20%
• Mass Spectrometry Methods 20%
• Complementary Measurements 20%
• Partial Removal 20%
• Decomposition Scheme 20%
• Total Removal 20%

Chemistry

• Tetramethylsilane 100%
• Methyl Group 20%
• Quadrupole 20%
• Plasma Polymerization 20%
• Spectroscopy 20%

Engineering

• Mass Spectrometer 40%
• High Resolution 20%
• Plasma Polymerization 20%
• Partial Removal 20%