Abstract
We report measurements of absolute cross sections for the electron-impact ionization and dissociative ionization of the SiDx (x=1-3) free radicals from threshold to 200 eV using the fast-neutral-beam technique. The deuterated rather than the protonated target species were used in order to allow a better separation of the various product ions from a given parent in our apparatus. A common feature of all three radicals studied in this work is a dominant parent ionization cross section with essentially the same absolute value of roughly 3.7×10-16 cm2 at 70 eV. Dissociative ionization processes for all three targets are less significant with a single dissociative process dominating in each case, viz. the removal of a single D atom (SiDx+e-→SiDx-1+D+2e -). The cross section for this dominant dissociative ionization channel also had the same maximum value of about 1.2×10-16 cm2 for all three targets. A comparison of the experimentally determined total single ionization cross sections with calculated cross sections using a modified additivity rule showed good to satisfactory agreement for all three targets in terms of the absolute values, but reveals some discrepancies in the cross section shapes.
Original language | English (US) |
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Pages (from-to) | 6315-6321 |
Number of pages | 7 |
Journal | Journal of Chemical Physics |
Volume | 105 |
Issue number | 15 |
DOIs | |
State | Published - 1996 |
ASJC Scopus subject areas
- General Physics and Astronomy
- Physical and Theoretical Chemistry