Electron-molecule collision cross sections for etching gases

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)

Original languageEnglish (US)
Title of host publicationNon-equilibrium processes in partially ionized gases
Subtitle of host publicationProceedings of the NATO ASI
EditorsM. Capitelli, J.N. Bardsley
Place of PublicationNew York
PublisherPlenum Press
Pages283-290
VolumeB220
StatePublished - 1990

Cite this