Original language | English (US) |
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Title of host publication | Non-equilibrium processes in partially ionized gases |
Subtitle of host publication | Proceedings of the NATO ASI |
Editors | M. Capitelli, J.N. Bardsley |
Place of Publication | New York |
Publisher | Plenum Press |
Pages | 283-290 |
Volume | B220 |
State | Published - 1990 |
Electron-molecule collision cross sections for etching gases
Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review