Energy distribution of ions bombarding biased electrodes in high density plasma reactors

Erik A. Edelberg, Andrew Perry, Neil Benjamin, Eray S. Aydil

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Energy distribution of ions bombarding biased electrodes in high density plasma reactors'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds