Extraction of parameters of High-K gate dielectrics from admittance data

Samares Kar, Surendra Rawat, Shaloo Rakheja, Dharmendar Reddy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004
State	Published - 2004

Cite this

@inproceedings{71933c8d63e042e799b7e5f6b3d9cf6b,

title = "Extraction of parameters of High-K gate dielectrics from admittance data",

author = "Samares Kar and Surendra Rawat and Shaloo Rakheja and Dharmendar Reddy",

year = "2004",

language = "English (US)",

booktitle = "Proceedings of the SEMATECH Workshop on Electrical Characterization and Reliability for High-K Devices, 2004",

}