TY - GEN
T1 - Extremely thin SOI for system-on-chip applications
AU - Khakifirooz, A.
AU - Cheng, K.
AU - Liu, Q.
AU - Nagumo, T.
AU - Loubet, N.
AU - Reznicek, A.
AU - Kuss, J.
AU - Gimbert, J.
AU - Sreenivasan, R.
AU - Vinet, M.
AU - Grenouillet, L.
AU - Le Tiec, Y.
AU - Wacquez, R.
AU - Ren, Z.
AU - Cai, J.
AU - Shahrjerdi, D.
AU - Kulkarni, P.
AU - Ponoth, S.
AU - Luning, S.
AU - Doris, B.
PY - 2012
Y1 - 2012
N2 - We review the basics of the extremely thin SOI (ETSOI) technology and how it addresses the main challenges of the CMOS scaling at the 20-nm technology node and beyond. The possibility of VT tuning with backbias, while keeping the channel undoped, opens up new opportunities that are unique to ETSOI. The main device characteristics with regard to low-power and high-performance logic, SRAM, analog and passive devices, and embedded memory are reviewed.
AB - We review the basics of the extremely thin SOI (ETSOI) technology and how it addresses the main challenges of the CMOS scaling at the 20-nm technology node and beyond. The possibility of VT tuning with backbias, while keeping the channel undoped, opens up new opportunities that are unique to ETSOI. The main device characteristics with regard to low-power and high-performance logic, SRAM, analog and passive devices, and embedded memory are reviewed.
UR - http://www.scopus.com/inward/record.url?scp=84869463426&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869463426&partnerID=8YFLogxK
U2 - 10.1109/CICC.2012.6330618
DO - 10.1109/CICC.2012.6330618
M3 - Conference contribution
AN - SCOPUS:84869463426
SN - 9781467315555
T3 - Proceedings of the Custom Integrated Circuits Conference
BT - Proceedings of the IEEE 2012 Custom Integrated Circuits Conference, CICC 2012
T2 - 34th Annual Custom Integrated Circuits Conference, CICC 2012
Y2 - 9 September 2012 through 12 September 2012
ER -