Extremely thin SOI for system-on-chip applications

A. Khakifirooz, K. Cheng, Q. Liu, T. Nagumo, N. Loubet, A. Reznicek, J. Kuss, J. Gimbert, R. Sreenivasan, M. Vinet, L. Grenouillet, Y. Le Tiec, R. Wacquez, Z. Ren, J. Cai, D. Shahrjerdi, P. Kulkarni, S. Ponoth, S. Luning, B. Doris

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science